Magnetron sputter depozition targets

Sputtering target materials for magnetron deposition — is an in-process metallic material, consisting of one or several components in the form of squared or round plates. They are utilized in powerful microwave appliances and field-effect transistors.

Material Composition, %
Al - base material
Si Cu Ti Ni
Al - - - -
Al-Si  0.5; 1; 1,5 - - -
Al-Cu   4 - -
Al-Ti   - - -
Al-Ni   - - 1
Al-Si-Ni  1,5 4 - -
Al-Si-Ti  1,5 - 1,5 -